Performance analysis of a MEMS cantilever beam
##plugins.themes.bootstrap3.article.sidebar##
Published
Mar 15, 2022
Keywords
capacitive accelerometer, Comsol, modeling, simulation
Issue
Section
Articles
Article Statistics
Reader : 105 times
Download : 95 times
Download : 95 times
##plugins.themes.bootstrap3.article.main##
T. Gomathi
School of Electrical and Electronics Engineering, Sathyabama Institute of Science and Technology, Chennai, India
Maflin Shaby
School of Electrical and Electronics Engineering, Sathyabama Institute of Science and Technology, Chennai, India
Abstract
The behaviour of a cantilever beam for a capacitive accelerometer is analysed through simulations, varying the parameters of displacement, electrical capacity, and voltage. Simulation is thus demonstrated to be a very useful design accelerator.