Performance analysis of a MEMS cantilever beam

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Published Mar 15, 2022
Citation Analysis

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T. Gomathi
School of Electrical and Electronics Engineering, Sathyabama Institute of Science and Technology, Chennai, India
Maflin Shaby
School of Electrical and Electronics Engineering, Sathyabama Institute of Science and Technology, Chennai, India

Abstract

The behaviour of a cantilever beam for a capacitive accelerometer is analysed through simulations, varying the parameters of displacement, electrical capacity, and voltage. Simulation is thus demonstrated to be a very useful design accelerator.

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Issue
Vol. 18 No. 1 (2022)
Section
Articles