Structural Properties of III-Nitrides Received by UV Stimulated Technology

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Published Oct 11, 2023
Citation Analysis

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Zurab Kushitashvili
LEPL Institute of Micro and Nanoelectronics, Chavchavadze ave.13, 0179 Tbilisi, Georgia
Amiran Bibilashvili
LEPL Institute of Micro and Nanoelectronics, Chavchavadze ave.13, 0179 Tbilisi, Georgia
Rezo Guliaevi
LEPL Institute of Micro and Nanoelectronics, Chavchavadze ave.13, 0179 Tbilisi, Georgia
Ana Kurtanidze
Ivane Javakhishvili Tbilisi State University, Chavchavadze ave.1, 0179 Tbilisi, Georgia

Abstract

In terms of structural studies, X-ray diffraction (XRD) studies are discussed in this paper. Based on the experimental results, X-ray diffraction graphs of III nitrides obtained with and without UV irradiation are shown and is evaluated the role of UV stimulation in magnetron sputtering technology.

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Issue
Vol. 20 No. 1 (2024)
Section
Articles